Cleanroom Expansion

The project involved the construction of a two-story addition at a chip tool manufacturer laboratory in Tualatin, Oregon.  The addition was 25,000 SF (nominal), with a partially enclosed utility yard, pipe trestles, and electrical and gas monitoring rooms. The building included a subfab, a Class 100 cleanroom, and an open plenum interstitial.  Key project elements included rooftop mounted make up air units, ceiling mounted fan filter units and return air sensible cooling coils, an acid waste lift station, utility and process system distribution, electrical distribution, and an emergency generator.  Alternate means for pyrophoric gas explosion control were developed for the existing gas room as the existing explosion venting panels were blocked by the addition.  The project was modeled in Revit, with Corbin Consulting modeling the MEP systems to a level of development (LOD) of 300 through construction documents, with the electrical systems taken to an LOD of 400 through construction. The project was delivered as a design-build procurement, with Corbin Consulting subcontracted to the mechanical (Apollo Mechanical Contractors) and electrical (OEG) subcontractors.

Client: Confidential
Size: 25,000 SF Nominal
Construction Cost: N/A
Completion Date: 2018


  • Programming and Feasibility Studies
  • Hazardous Occupancy Code Evaluations
  • Mechanical and HVAC System Design
  • Process System and Piping Design
  • Structural Engineering
  • Electrical System and Lighting Design
  • Instrumentation and Controls Design
  • Life Safety Security and Telecom Design
  • Engineering Support During Construction
  • Project Management